Specs Confocal Displacement Sensor CL-3000 series

Optical Units and Sensor Heads - Quad type

Model

CL-L007N*1

CL-L015N*1

CL-L030N*1

CL-L070N*1

CL-L150N*1

Image

Type

Optical unit

Head

CL-L007 *1

CL-L015 *1

CL-L030 *1

CL-L070 *1

CL-L150 *1

Reference distance

7 mm

15 mm

30 mm

70 mm

150 mm

Reference measurement range

Measurement range

± 1.5 mm

± 1.3 mm

± 3.7 mm

± 10 mm

± 35 mm

Linearity

± 2.1 µm *2

± 0.49 µm *2

± 0.94 µm*2

± 2.2 µm*2

± 5.65 µm*2

High precision measurement range

Measurement range

± 0.5 mm

± 1.0 mm

± 3.0 mm

± 15 mm

Linearity

± 0.91 µm *2

± 0.41 µm *2

± 0.72 µm *2

± 2.0 µm *2

± 4.65 µm *2

Resolution

0.25 µm*3

Spot diameter

ø 750 µm

ø 300 µm

ø 500 µm

ø 600 µm

ø 1000 µm

Laser class

Optical unit

Class 1

Sampling cycle

100/200/500/1000 µs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP67 (IEC60529)

Ambient light

Target surface illuminance 30,000 lux (Incandescent lamp)

Ambient temperature

0 to 50°C

Relative humidity

85% RH or less (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes

Optical unit

10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes

Shock resistance

15G 6 ms

Temperature characteristic

Head

0.005% of F.S. / °C

Optical unit

0.015% of F.S. / °C

Material

Head

SUS

Front: SUS Rear: Aluminium

Optical unit

Polycarbonate

Weight

Head

Approx. 140 g

Approx. 180 g

Approx. 200 g

Approx. 280 g

Approx. 380 g

Optical unit

Approx. 1600 g

*1 Sensor head and optical unit are a matched pair. Not cross compatible.
*2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).
*3 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface).

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Optical Units and Sensor Heads - Focused spot type

Model

CL-P007N*1

CL-P015N*1

CL-P030N*1

CL-P070N*1

CL-P150N*1

Image

Type

Optical unit

Head

CL-P007 *1

CL-P015 *1

CL-P030 *1

CL-P070 *1

CL-P150 *1

Reference distance

7 mm

15 mm

30 mm

70 mm

150 mm

Reference measurement range

Measurement range

± 1.5 mm

± 1.3 mm

± 3.7 mm

± 10 mm

± 35 mm

Linearity

± 0.96 µm*2

± 0.49 µm*2

± 0.94 µm*2

± 2.2 µm*2

± 5.65 µm *2

High precision measurement range

Measurement range

± 0.5 mm

± 1.0 mm

± 3.0 mm

± 15 mm

Linearity

± 0.55 µm *2

± 0.41 µm *2

± 0.72 µm *2

± 2.0 µm *2

± 4.65 µm *2

Resolution

0.25 µm

Spot diameter

ø 50 µm

ø 25 µm

ø 38 µm

ø 50 µm

ø 75 µm

Laser class

Optical unit

Class 1

Sampling cycle

100/200/500/1000 µs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP67 (IEC60529)

Ambient light

Target surface illuminance 30,000 lux (Incandescent lamp)

Ambient temperature

0 to 50°C

Relative humidity

85% RH or less (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes

Optical unit

10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes

Shock resistance

15G 6 ms

Temperature characteristic

Head

0.005% of F.S. / °C

Optical unit

0.015% of F.S. / °C

Material

Head

SUS

Front: SUS Rear: Aluminium

Optical unit

Polycarbonate

Weight

Head

Approx. 140 g

Approx. 180 g

Approx. 200 g

Approx. 280 g

Approx. 380 g

Optical unit

Approx. 1600 g

*1 Sensor head and optical unit are a matched pair. Not cross compatible.
*2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).

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Model

CL-S015N*1

CL-V020N*1

CL-V050N*1

CL-PT010N*1

Image

Type

Optical unit

Head

CL-S015 *1

CL-V020 *1

CL-V050 *1

CL-PT010 *1

Reference distance

15 mm

20 mm

50 mm

10 mm

Reference measurement range

Measurement range

± 1.0 mm

± 1.3 mm

± 4 mm

± 0.3 mm

Linearity

± 0.35 µm*2

± 0.45 µm*2

± 1.4 µm*2

± 0.22 µm*2

High precision measurement range

Measurement range

− 0.2 mm/− 1.0 mm

± 0.5 mm

± 1.6 mm

± 0.15 mm

Linearity

± 0.25 µm *2

± 0.38 µm *2

± 1.3 µm *2

± 0.2 µm *2

Resolution

0.25 µm*3

0.25 µm*6

Spot diameter

ø 10 µm

ø 20 µm

ø 40 µm

ø 3.5 µm

Laser class

Optical unit

Class 1

Sampling cycle

100/200/500/1000 µs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP50

IP40 degassed structure for vacuum environments *4

IP64 (IEC60529)

Ambient light

Target surface illuminance 30,000 lux (Incandescent lamp)

Operating ambient temperature

Head

− 20 to 70°C

− 20 to 200°C

0 to 50°C

Optical unit

0 to 50°C

Relative humidity

85% RH or less (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm; 2 hours each for X, Y, and Z axes

10 to 57 Hz, double amplitude 0.45 mm; 2 hours each for X, Y, and Z axes

Optical unit

10 to 57 Hz, double amplitude 0.3 mm; 2 hours each for X, Y, and Z axes

Shock resistance

15G 6 ms

Vacuum

Vacuum environments

Ultra-high-vacuum environments *5

None

Explosion-proof rating

Explosion-proof performance

Head

None

Optical unit

Zone/Division

Head

Optical unit

Ambient temperature

Head

Optical unit

Certification number

Temperature characteristic

Head

0.005% of F.S. / °C

0.013% of F.S. / °C

0.015% of F.S. / °C

0.1% of F.S. / °C

Optical unit

0.015% of F.S. / °C

Material

Head

SUS303/304

SUS304

Front: SUS Rear: Aluminium

Optical unit

Polycarbonate

Weight

Head

Approx. 350 g

Approx. 100 g

Approx. 1100 g

Optical unit

Approx. 1600 g

*1 Sensor head and optical unit are a matched pair. Not cross compatible.
*2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).
*3 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface).
*4 The enclosure rating is equivalent to IP50 when the included sticker is attached.
*5 Operation verification has been performed in environments of 10^-6 Pa.
*6 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface).(Value measured with 4096 average cycles on CL-PT010/CL-PT010N only.)

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