Laser Scanning Confocal Microscopes

Laser Scanning Microscopes

Laser scanning microscopes incorporate two light sources: a white light for gathering colour information, and a laser source for gathering height information. To capture height data, the laser is scanned in the XYZ directions across the surface of the sample, and the reflected light intensity is measured. The result is a high-resolution, large depth-of-field, colour image with nanometre-level height resolution for accurate profile and roughness measurements.

Functional diagram of measurement principle. 1. The laser scans in the X and Y directions. 2. The objective lens moves in the Z direction and the laser scans in the X and Y directions again. 3. This scanning procedure is repeated until the end of the measurement depth is reached. 4. The measurement is then complete.