Surface Scanning Laser Confocal Displacement Meter

LT-9000 series

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Sensor Head, Not Subject to Export Control, with Camera Function LT-9031M

LT-9031M - Sensor Head, Not Subject to Export Control, with Camera Function






Measurement range

±1.0 mm

Reference distance

30 mm

Light source


Red semiconductor laser


655 nm


170 µW (IEC 60825-1) /3.0 µW (FDA (CDRH) Part 1040.10)

Laser Class

Class IIa Laser Product (FDA (CDRH) Part 1040.10)
Class 1 Laser Product (IEC 60825-1)

Spot diameter

Approx. ø7 µm

Scan width/interval

0 to 560 µm (6 steps) /1 to 8 µm (4 steps)


0.3 µm*1


±0.3 % of F.S.*1

Sampling cycle

640 µs to 187 ms (14 steps)*2


Minimumdisplayable unit

0.1 µm*3

Display range

±9,999.99 µm

Microscope function


Display cycle

10 times/sec.*4

Terminal block

Analogue output

±10 V x 2 outputs, output impedance: 100 Ω

Timing input

Non-voltage input

Reset input

Auto-zero input

Monitor dedicated power supply

24 VDC*5

Control I/O

Judgment mode

3-step limits output

For OUT1 and OUT2, and NPN open collector output*6

Binary mode

Binary output

Measured data output (21 bits), OUT1/OUT2/PROFILE selectable
NPN open collector output*6

Strobe output

NPN open collector output*6

Binary selector output

Binary selection input

Non-voltage input*6

Stability output

NPN open collector output

Laser remote input

Non-voltage input

Program switching input

Non-voltage input x 3 inputs

RS-232C interface

Measured data output and control I/O (Selectable up to baud rate 115200 bps.)

Video output

NTSC compliant (PIN connector)

Microscope function

Function presence/absence


Field of view

2.5 mm x 2.0 mm



Illumination light source

Infrared LED
(wavelength: 870 nm)

Main functions

Displacement mode

Distance measurement,
Transparent object thickness measurement,
Surface selection, Dark-out, Mask, Trend
graph display,
and Scan width/interval change*7

Profile mode



Light intensity accumulation, Microscope (LT-9501H, LT-9501HSO (5654) only),
Tolerance judgement, 8-program registration, Calibration, Averaging, Hold modes,
Auto-zero, and interface language selection

Temperature characteristics (20 to 30°C)

±0.25% of F.S.


Power voltage

100 to 240 VAC ±10 %, 50/60 Hz

Power consumption

110VA or less

Environmental resistance

Pollution degree


Overvoltage category


Ambient light

Incandescent lamp/fluorescent lamp: 10,000 lux max.

Ambient temperature

0 to +35 °C

Relative humidity

35 to 85 % RH (No condensation)


Approx. 500 g

*1 The value when the measurement target is a mirrored surface object measured in displacement mode, scan width/interval 120 µm/2 µm, and 8-times average
*2 Sampling cycle differs according to the manufacturing variation of individual measuring units. The value when the FINE mode is set to OFF.
*3 Display changes every ±0.3 µm.
*4 Varies depending on the setting
*5 Dedicated power supply for the monitor specified by KEYENCE.
*6 Select either the Limits mode or the Binary mode.
*7 Select either the Distance mode or the Profile mode. (Only distance mode is available with the LT-9501HSO (5654) and LT-9001HSO (5655).)
The rating of the NPN open-collector output is 30 mA (30 V or lower) maximum, and residual voltage is 0.5 V.
The rating of the Non-voltage input is ON voltage 1 V or lower, and OFF current 0.6 mA or lower.

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