3D Laser Scanning Microscope

VK-X3000 series

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3D Laser Scanning Microscope VK-X3000 series

Now Equipped with White Light Interferometry, Measure from Nanometres to Millimetres

Triple Principle Integrated Laser - White Light Interferometry - Focus Variation

  • Measure targets ranging from nanometres to micrometres to millimetres
  • Perform various analysis with just one device
  • Best-in-Class 0.01 nm Resolution

VK-X3000 series - 3D Laser Scanning Microscope

The VK-X3000 Series uses a triple scan approach to enable measurement of any target. White light interferometry, focus variation, and laser confocal scanning methods are used depending on the situation, ensuring high-accuracy measurement and analysis of any target. The triple scan approach offers unprecedented adaptability, allowing the system to achieve 0.01 nm resolution to identify the smallest surface irregularities on flat targets, while also offering the flexibility to measure targets with large height changes across areas as large as 50 x 50 mm. With its ability to perform high-magnification colour imaging, non-destructive cross-section measurements, and advanced surface characterization, the VK-X3000 3D Surface Profiler is the go-to-system for R & D and quality labs.


Basic Characteristics


Extensive magnification coverage range in one device

  • Magnification 42× to 28,800×
  • Automatic focusing
  • Observe any material


Instant, non-contact surface scanning

  • No damage to target
  • Accurate nano-level measurement
  • Compatible with any shape or material


Unprecedented surface characterisation

  • Quantification of even the most detailed shapes
  • Differentiate surfaces easily
  • Roughness analysis

Triple Scan Approach Enables Measurement of Any Target

White light interferometry / Laser confocal / Focus variation

Highly accurate measurement of any target is possible through the use of three different measurement principles: laser confocal, white light interferometry, and focus variation.

Best-in-Class 0.01 nm Resolution

Accurately measure minute changes in shape at the nano level.
Even difficult materials, such as transparent or mirrored surfaces can be measured.

Nanometre Resolution across the Entire Target

Up to 50 x 50 mm areas can be scanned, so the entire surface of the sample can be measured and analysed.

Measure Both Flat and Uneven Surfaces

Millimetre, micrometre, and nanometre measurements in one device.