Triple scan approach enables measurement of any target

Highly accurate measurement of any target is possible through the use of three different measurement principles: laser confocal, white light interferometry, and focus variation.

White light interferometry
Laser confocal
Focus variation

Best-in-class 0.01 nm resolution

Accurately measure minute changes in shape at the nano level.
Even difficult materials, such as transparent or mirrored surfaces can be measured.

Nanometre resolution across the entire target

Up to 50 x 50 mm areas can be scanned, so the entire surface of the sample can be measured and analyzed.

Measure both flat and uneven surfaces

Millimetre, micrometre, and nanometre measurements in one device

Learn more in the catalogue