>> 2-Mega Pixel CCD
>> New 3D Profile Microscope

Measuring 3-D Profiles with a Microscope
Automatic measurement of 3-D profiles is made possible by integrating a high-precision linear stage and a newly developed profile measurement function.
dot 3-D Profile Measurement*
* This function is featured by the VHX-H1MK.
Bump on semiconductor (3000x)
Bump on semiconductor (3000x)
Parallel lines can be drawn allowing for simplified comparative observation.
3-D images are generated from 2-D cross sections that are automatically captured. Using this data, the height and width of projections and depressions can be measured and displayed on a graph.
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-> 2-Mega Pixel CCD
  This first-in-its-class 2-mega-pixel image system can substantially reduce the cost and man-hours required for inspections in manufacturing processes.More...
dot Color/Scale Display for Height Data*
* This function is featured by the VHX-H1MK.
    Coin (450x)
The 3-D image is rendered into a color scale, which maps higher elevations in red, and lower elevations in blue. The color scaled image can then be displayed on top of the raw image, creating an enhanced topographical view. 3-D raw image +topography image
    3-D raw image + topography image
dot Accurate Observation and Smooth Operation Made Simple
Height Measurement between Two Points
The difference between two windows can easily be detected using the Auto measurement mode.
Digital Focus Function
Fully automatic generation of high-quality depth composition images and 3-D images can be performed by simple mouse operations.
Auto Focus Function
Focus adjustment under high magnification can be performed easily and accurately.
  VHX Digital Microscope
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  Download the solution guide for further details.
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VHX Profile Measurement Unit pdf_icon
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VHX Profile Measurement Unit
[360KB] 4pages
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The Ultimate Digital Microscope pdf_icon
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The Ultimate Digital Microscope
[2.3MB] 24pages
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