Spectral Interference Reflection Method
SI Series

SI Series

Although systems with two sensors are common, if the position of one side is predetermined or if the target is transparent, measurement with one sensor is possible.
Detection methods differ according to the measurement conditions, and sometimes special arrangements can be made. Contact your nearest sales office with any questions.

Point of selection

  • Ultra-high accuracy with 1 nm resolution
  • Unaffected by ambient temperature
SI-F Series
Spectral Interference Laser Displacement Sensor
SI-F Series