Spectral Interference Method
SI Series

SI Series

The stroke amount is measured using measurement instruments that enforce the spectral interference method.
Sensor heads are as small as ¤ć2 mm, allowing measurement even in narrow locations is possible.

Point of selection

  • Ultra-high accuracy with 1 nm resolution
  • Unaffected by ambient temperature
SI-F Series
Spectral Interference Laser Displacement Sensor
SI-F Series