Digital MicroscopeVHX-900 series

VHX-S15CE

3D Auto Measurement Unit (Controller)

SPECIFICATIONS

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Model

VHX-S15CE

Motor

5-phase stepping motor

Positioning accuracy

6 µm*1

Repeatability

±0.5 µm*1

Stage stroke distance

15 mm

Resolution

0.05 µm/pulse

Load capacity

5 kg

Rating

Power voltage

100 to 240 VAC, 50/60 Hz

Power consumption

70 VA

Environmental resistance

Ambient temperature

+5 to +40 °C

Relative humidity

35 to 80 % RH (No condensation)

Weight

Controller: 3 kg

*1 Positioning accuracy and repeatability specifications apply to the motorised stage

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