Image Dimension Measuring SystemIM-6000 series

IM-6700

Controller

SPECIFICATIONS

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Model

IM-6700

Type

Controller

Image sensor

1" 6.6 mega pixel monochrome CMOS

Display

10. 4" LCD monitor (XGA: 1024 × 768)
External monitor connectable (clone output)

Receiver lens

Double telecentric lens

Image measurement

Field of view

Wide field: ø100 × L200 mm, High precision: 25 × L125 mm

Minimum display unit

0.1 µm

Repeatability

W/o stage movement

Wide field: ±1 µm, High precision: ±0. 5 µm

With stage movement

Wide field: ±2 µm, High precision: ±1. 5 µm

Measurement accuracy (±2σ)

W/o binding

Wide field: ±5 µm*1, High precision: ±2 µm*2

With binding

Wide field: ±(7 + 0. 02 L) µm*3, High precision: ±(4 + 0. 02 L) µm*4

External remote input

Non-voltage input (with and without contact)

External output

OK/NG/FAIL/MEAS.

Relay output/rated load: 24 VDC, 0. 5 A/ON resistance

Interface

LAN

RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)

USB 2.0 series A

6 ports (front: 2, rear: 4)

Record

Hard disk drive

250 GB

Illumination system

Transparent

Telecentric transparent illumination

Ring

Four division, multi-angle illumination (electric)
Slit ring (directivity) illumination (electric)

X stage

Moving range

100 mm (electric)

Z stage

30 mm (electric)

Withstand load

2 kg

Measurement points

99 points max. (99 × 9 points possible when the function for consolidating measurement settings is used)

Pattern search (profi le tracking function)

XYθ (with 360° rotary position compensation)

Pattern registration

1000 patterns or more*5

Measurement time

2 seconds*6

Basic measurement function

Distance measurement

8 types (point-point/line-point/line-line/circle-point/circle-line/circle-circle/circle/arc)

Angle measurement

Provided

Calculation

Virtual line function

Point

Middle point/intersection

Conjunction edge

Line conjunction/circular conjunction

Line

6 types (midline/perpendicular line/parallel lines/tangent line/line passing through a point/approximate line)

Circle

Middle circle/approximate circle/auxiliary circle/inscribed and circumscribed circle

Application tool

Pitch measurement

Line/circumference

Pitch angle

Width measurement

Edge width

Thickness measurement

Thickness measurement/gap measurement between inner and outer diameters

Special tool

Rounded corner/curved surface/oval/reticle/point position/perimeter/area/screw/automatic measurement

GD&T

Shape tolerance

Straightness/circularity/profile

Orientation tolerance

Squareness/parallelism

Position tolerance

Point position/concentricity

Element tool

Point

Point (on a line or arc)/maximum and minimum (rectangle, circle, arc)

Line

Line/centre line/peak line

Circle

Circle/arc/peak circle/peak arc

Profi le extraction

Provided

Special tool

Automatic generation/gauge line

Manual measurement

Provided

Coordinate system confi guration

Batch confi guration of tolerance

Element list editing

Measurement setting data binding function

DXF export function

Automatic measurement function

Q-DAS data save function

Measurement settings support functions

Provided*7

Power supply

Power voltage

100 to 240 VAC 50/60 Hz

Power consumption

310 VA max.

Environmental resistance

Ambient temperature

+10 to +35 °C

Relative humidity

20 to 80 % RH (No condensation)

Weight

Approx. 8 kg

*1 In the range of ø80 mm from the centre of the stage within the operating ambient temperature range of +23°C ±1.0°C at the focused focal point position
*2 In the range of ø20 mm from the centre of the stage within the operating ambient temperature range of +23°C ±1.0°C at the focused focal point position
*3 In the range of ø80 × 180 mm from the centre of the stage, within the operating ambient temperature range of +23°C ±1.0°C at the focused focal point position, and with a load weighing 1 kg or less on the stage (L = amount of stage movement in mm units)
*4 In the range of ø20 × 120 mm from the centre of the stage, within the operating ambient temperature range of +23°C ±1.0°C at the focused focal point position, and with a load weighing 1 kg or less on the stage (L = amount of stage movement in mm units)
*5 Depending on the measurement setting data and number of data pieces being stored
*6 Without pattern search, applied measurement, and stage movement
*7 Optimum lighting guide, optimum lighting search, automatic edge extraction parameter adjustment function, and multiple edge extraction function

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