| Hot Liquid : Controlling the supply of solution in a PC board cleaner |
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| Controls the flow of cleaning solution used in a single wafer processing cleaner. Since the PFA type sensor head is made of fluorine plastic, it can be used for detection of various chemical solutions and pure water. |
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| Cooling water : Controlling the supply of wafer cleaning solution |
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| Controls the flow of the cleaning solution used for effective wafer cleaning and the pure water used for rinsing. Since the PFA type sensor head is made of fluorine plastic, it can be used for detection of various chemical solutions and pure water. |
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